流动状态对悬浮微通道谐振器测量影响的研究

RESEARCH OF THE EFFECTS OFFLOW STATE ON THE SUSPENDED MICROCHANNEL RESONATOR MEASUREMENT

  • 摘要: 悬浮微通道谐振器(Suspended Microchannel Resonator, SMR)因其微尺寸和高灵敏度,在传感器领域有广泛应用,可用于测量微弱的力值、质量、密度和流体粘度等物理量。本论文考虑流体运动状态对悬臂梁受力的影响,建立了流固耦合运动方程,并进行数值求解,研究了流体密度和流动状态对悬臂梁谐振器谐振频率和变形的影响。结果表明,流体密度增加,悬臂梁谐振频率降低,形变增大;流动雷诺数与谐振频率呈线性相关,且随雷诺数增大,频率误差系数逐渐增大,影响测量精度。研究结果为提高微通道谐振器的测量精度和灵敏度技术提供理论支持。

     

    Abstract: The Suspended Microchannel Resonator has extensive applications in the sensor field due to its micro-size and high sensitivity. It can be used to measure physical quantities such as weak force values, mass, density, and fluid viscosity. In this study, considering the impact of fluid motion on the cantilever beam's mechanics, a fluid - structure coupling equation is formulated and numerically solved. The effects of fluid density and flow conditions on the cantilever - beam resonator's resonant frequency and deformation are explored. Results show that rising fluid density reduces the resonant frequency and increases deformation. There is a linear link between the Reynolds number and the resonant frequency. As the Reynolds number grows, the frequency error coefficient increases, affecting measurement accuracy. These findings provide theoretical support for improving the measurement accuracy and sensitivity of microchannel resonators.

     

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