Abstract: The micro-miniature of electronic devices isgreatly promoted by the rapid development of electronics industry. Thestudy on the reliability of the micro-electronic devices is the foundationof designing novel electronic products, and has drawnmuch attention of researchers. The parameters of mechanical behaviorobtained from experiment are the basis of reliability analysis. In this study, thedevelopment of micro-moir\'e methods is reviewed, covering moir\'einterferometry, scanning electronic microscope moir\'e methods and theirapplications to analysis of mechanical behavior of the micro-electronicdevices are discussed.