硅生长过程中尖形磁场对流场及提拉速率的影响

EFFECT OF THE CUSP MAGNETIC FIELD ON FLOW FIELD AND PULLING RATE DURING SI SINGLE CRYSTAL GROWTH PROCESSES

  • 摘要: 通过使用基于非正交网格有限体积法的FLUTRAPP (fluidflow and transport phenomena program)程序模拟了工业8\,in单晶硅提拉法生长过程. 数值模拟结果表明,流场及提拉速率在单晶硅生长过程中具有振荡特性,提拉速率的振荡周期大约为2\,min. 尖形磁场的引入能够抑制坩埚中熔体流动的振荡,减小提拉速率的振幅,从而有利于提高所生长单晶的质量.

     

    Abstract: The growth process of industrial 8 inch single crystals issimulated by FLUTRAP(fluid flow and transport phenomena program), which isbased on non-orthogonal grid and finite-volume method. The results show thatthe flow field inside the crucible and the pulling rate are oscillating duringthe growth processes. The pulling rate is fluctuating with a period of about 2minutes. The fluctuation amplitude of the pulling rate could be reduced byapplying a cusp magnetic field.

     

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