多层膜结构对硬度实验影响的数值分析
NUMERICAL ANALYSIS OF INFLUENCE OF MULTI-LAYER FILMS CONSTRUCTS ON NANOHARDNESS EXPERIMENTS
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摘要: 为了研究多层膜结构对纳米微硬度实验的影响，用FEPG对纳米微硬度实验中压头的压入过程进行数值模拟，分析了由TiN, Al, Ti组成的多层膜中软膜材料不同、软膜与硬膜厚度比不同以及多层膜层数不同对膜层体系产生的影响，得出梯度变化的膜层结构能够提高膜层的整体性能, 为纳米微硬度实验提供了一定的参考依据.Abstract: In this paper, in order to annlysis the influence of multi-layer componenton microhardness testing, the pressing process of the indenter is simulatedby FEPG (Finite Element Program Generator) software. The effects onmulti-layers system including of different material soft layers, differentthickness proportion between soft layer and hard layer and different layernumber in the multilayer are analyzed. A conclusion that multilayerconstruct according to gradient layer can enhance film performance isdrew. It is helpful to provide the reference data for microhardness testing.
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