面向极紫外光源的偏心碰撞金属液滴靶

Generation of Liquid Metal Microdroplets for Extreme Ultraviolet Source Target using Eccentric Droplet Collision

  • 摘要: 基于极紫外(EUV)光源对小直径、长间距金属液滴串的需求,本文提出在二维平面内精确调控偏心率的方法,首次系统研究了液态金属(镓-铟-锡合金)通过双液滴偏心碰撞产生单分散卫星液滴串。通过高速相机成像获取了偏心碰撞产生的丝状韧带和卫星液滴的统计学特征。校正并给出适用于低奥内佐格数(Oh)数的临界偏心率模型,能够准确预测临界拉丝阈值,并揭示了丝状韧带体积与长度随偏心率呈单峰的非单调规律,建立了统一标度。稳定获得了小直径(约20±2 μm)、大间距(约200±5 μm)、高频率(约18–43 kHz)的单分散卫星液滴串,验证了液态金属液滴偏心对碰撞作为面向极紫外光源的微米级液滴靶串生成途径的可行性。

     

    Abstract: To meet the requirements of applications such as extreme ultraviolet (EUV) sources for droplet trains with small diameters, large spacing, and high sphericity, this work proposes a method to generate micron-scale droplet trains by precisely controlling the eccentric collisions of liquid-metal droplets in a two-dimensional plane. The formation of monodisperse satellite droplet trains resulting from eccentric binary collisions of Ga–In–Sn alloy droplets is systematically investigated. A critical eccentricity model applicable to low Ohnesorge number (Oh) conditions is developed, which enables accurate prediction of the stretching-separation threshold. A non-monotonic, single-peak dependence of ligament volume and length on eccentricity is revealed, and a unified scaling relationship is established. Consequently, stable monodisperse satellite droplet trains are achieved with small diameters (~20 ± 2 μm), large spacing (~200 ± 5 μm), and high repetition rates (~18–43 kHz), satisfying the specifications for EUV droplet targets.

     

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