微尺度力学测量中的采样云纹方法:工艺、原理及应用

SAMPLING MOIRÉ METHOD IN MICRO-SCALE MECHANICAL MEASUREMENT: FUNDAMENTALS, METHODS, AND APPLICATIONS

  • 摘要: 采样云纹方法作为一种新兴的光学测试技术,利用数字图像处理实现了光栅相位分析的数字化与自动化,可实现低成本、高效率、高精度的物体表面变形计量。该方法能灵活调整采样参数以满足不同实验场景的尺度需求,因此与扫描电子显微镜(scanning electron microscopy, SEM)结合,可以实现变倍视场下的显微力学分析。然而,在微尺度环境下开展高精度的采样云纹测量需要轮廓清晰、分布规则的光栅或点阵结构,这对微尺度的光栅制备工艺提出了较高的要求。为了进一步拓展采样云纹在微尺度力学测量中的应用潜力,本文介绍了采样云纹法变形测量的基本原理,发展了一种基于激光直写光刻的微尺度制栅方法,并探讨了其在微尺度力学测量中的应用。

     

    Abstract: Sampling moiré method, as a novel optical measurement technique, has achieved digitalization and automation of phase analysis through digital image processing. This enables low-cost, high-efficiency, and high-precision surface deformation measurement of objects. The method allows flexible adjustment of sampling parameters to meet the scale requirements of different experimental scenarios, making it compatible with scanning electron microscopy (SEM) for microscopic mechanical analysis under variable magnification conditions. However, conducting high-precision sampling moiré measurements in micro-scale environments requires gratings or dot-array structures with clear contours and regular distributions, imposing high demands on micro-scale grating fabrication techniques. To further expand the application potential of sampling moiré in micro-scale mechanical measurement, this paper introduces the basic principles of orthogonal sampling moiré method, which can simultaneously perform dual-directional phase analysis and deformation reconstruction. A micro-scale grating fabrication method based on laser direct writing lithography is developed, and the quality of the fabricated gratings is evaluated using two indicators: grating structure similarity and phase average relative error. Taking the fatigue fracture of nickel-based alloy GH4169 as an example, this study characterizes material damage accumulation and crack closure effects, exploring the application of sampling moiré method in micro-scale mechanical measurement.

     

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