A TESTING SYSTEM FOR PIEZOELECTRIC CONSTANTS BASED ON THE PRINCIPLE OF LASER SCANNING FABRY-PEROT INTERFEROMETER
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Graphical Abstract
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Abstract
Based on a method of measuring tiny deformation by scanningFabry-Perot interferometer, a testing system for piezoelectric constantsis proposed. In this paper, we discuss the measuring principle, themeasuring apparatus, and experimental results for a typical example. Thepiezoelectric constants obtained by this method are in very good agreement with theexperiment data by the IEEE method.
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