RESEARCH ON SEVERAL MECHANICAL PROBLEMS IN MICROELECTROMECHANICAL SYSTEMS

This paper reviews the state-of-the-art of researches on several solidmechanics problems in Microelectromechanical Systems (MEMS), includingthe basic mechanical properties of materials, mechanical analysis ofmicrostructures, failure analysis of microsystems and actuatingmechanisms of microsystems. Different kinds of acting forces,multi-factor interactions, multi-disciplinary nature and non-linearity due to the scaling effect andsurface effect are emphasized, and the future work inthis field is suggested.