EFFECT OF THE CUSP MAGNETIC FIELD ON FLOW FIELD AND PULLING RATE DURING SI SINGLE CRYSTAL GROWTH PROCESSES[J]. MECHANICS IN ENGINEERING, 2009, 31(4): 24-27. DOI: 10.6052/1000-0879-2008-200
Citation: EFFECT OF THE CUSP MAGNETIC FIELD ON FLOW FIELD AND PULLING RATE DURING SI SINGLE CRYSTAL GROWTH PROCESSES[J]. MECHANICS IN ENGINEERING, 2009, 31(4): 24-27. DOI: 10.6052/1000-0879-2008-200

EFFECT OF THE CUSP MAGNETIC FIELD ON FLOW FIELD AND PULLING RATE DURING SI SINGLE CRYSTAL GROWTH PROCESSES

  • The growth process of industrial 8 inch single crystals issimulated by FLUTRAP(fluid flow and transport phenomena program), which isbased on non-orthogonal grid and finite-volume method. The results show thatthe flow field inside the crucible and the pulling rate are oscillating duringthe growth processes. The pulling rate is fluctuating with a period of about 2minutes. The fluctuation amplitude of the pulling rate could be reduced byapplying a cusp magnetic field.
  • loading

Catalog

    Turn off MathJax
    Article Contents

    /

    DownLoad:  Full-Size Img  PowerPoint
    Return
    Return