力学与实践 ›› 2017, Vol. 39 ›› Issue (5): 449-454.DOI: 10.6052/1000-0879-17-094

• 应用研究 • 上一篇    下一篇

原子力显微镜探针振动的简化模型分析

丁文璇, 刘运鸿, 魏征   

  1. 北京化工大学机电工程学院, 北京 100029
  • 收稿日期:2017-03-22 修回日期:2017-05-12 出版日期:2017-10-15 发布日期:2017-11-06
  • 作者简介:魏征,博士,副教授.E-mail:weizheng@mail.buct.edu.cn
  • 基金资助:

    国家自然科学基金(11572031)和非线性力学国家重点实验室开放基金资助项目.

SIMPLIFIED VIBRATION MODELS FOR AFM PROBE

DING Wenxuan, LIU Yunhong, WEI Zheng   

  1. College of Mechanical and Electrical Engineering, Beijing University of Chemical Technology, Beijing 100029, China
  • Received:2017-03-22 Revised:2017-05-12 Online:2017-10-15 Published:2017-11-06

摘要:

为对原子力显微镜(atomic force microscope,AFM)的微悬臂梁进行定性动力学特性分析,建立AFM微悬臂梁的简化模型,探讨AFM探针的受迫振动.通过理论计算得出AFM探针简化模型的运动方程,并得到振动波形,证明了AFM实际应用中的对称问题和"频漂"问题,并发现AFM简化模型的间歇式碰撞现象.用负弹簧模拟探针针尖与样品之间的长程引力,并通过理论计算探讨长程引力对AFM测量的影响.

关键词:

原子力显微镜|轻敲模式|受迫振动

Abstract:

The simplified models of the AFM (atomic force microscope) probe are proposed for a qualitative analysis of dynamic characteristics of the AFM. The forced vibration of the probe is analyzed on the basis of the simplified models. The motion equations are derived based on the models and the wave modes of the AFM probe are obtained by a theoretical calculation. The symmetry problem and the frequency drift are confirmed in the calculation, as consistent with the AFM tests. Meanwhile, an intermittent collision phenomenon is found in the simplified models. The effect of the long-range attractive force on the AFM probe is simulated through a negative spring model.

Key words:

atomic force microscope|tapping mode|forced vibration

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