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力学与实践 ›› 2009, Vol. 31 ›› Issue (4): 24-27.doi: 10.6052/1000-0879-2008-200

• 应用研究 • 上一篇    下一篇

硅生长过程中尖形磁场对流场及提拉速率的影响

陈启生 秦明 邓谷雨   

  1. 中国科学院力学研究所
  • 收稿日期:2008-04-11 修回日期:1900-01-01 出版日期:2009-08-08 发布日期:2009-08-08

EFFECT OF THE CUSP MAGNETIC FIELD ON FLOW FIELD AND PULLING RATE DURING SI SINGLE CRYSTAL GROWTH PROCESSES

  • Received:2008-04-11 Revised:1900-01-01 Online:2009-08-08 Published:2009-08-08

摘要: 通过使用基于非正交网格有限体积法的FLUTRAPP (fluid flow and transport phenomena program)程序模拟了工业8\,in单晶硅提拉法生长过 程. 数值模拟结果表明,流场及提拉速 率在单晶硅生长过程中具有振荡特性,提拉速率的振荡周期大约为2\,min. 尖形磁 场的引入能够抑制坩埚中熔体流动的振荡,减小提拉速率的振幅,从而有利于提高 所生长单晶的质量.

关键词: 提拉法,单晶硅,流动振荡,提拉速率

Abstract: The growth process of industrial 8 inch single crystals is simulated by FLUTRAP(fluid flow and transport phenomena program), which is based on non-orthogonal grid and finite-volume method. The results show that the flow field inside the crucible and the pulling rate are oscillating during the growth processes. The pulling rate is fluctuating with a period of about 2 minutes. The fluctuation amplitude of the pulling rate could be reduced by applying a cusp magnetic field.

Key words: Czochralski method, silicon single crystal, flow