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力学与实践 ›› 2009, Vol. 31 ›› Issue (3): 1-8.doi: 10.6052/1000-0879-2008-439

• 专题综述 •    下一篇

显微云纹技术在微电子器件力学测量中的应用

谢惠民 王怀喜 刘清珺 岸本哲 戴福隆   

  1. 清华大学工程力学系
  • 收稿日期:2008-09-08 修回日期:1900-01-01 出版日期:2009-06-08 发布日期:2009-06-08

APPLICATION OF MICRO-MOIR\'{E} TECHNIQUE TO MECHANICS MEASUREMENT FOR MICRO-ELECTRONIC DEVICES

  • Received:2008-09-08 Revised:1900-01-01 Online:2009-06-08 Published:2009-06-08

摘要: 电子工业的不断发展促进了电子器件的微小型化,作为新型产品设计基础的微电子器件可靠 性分析成为人们非常关注的问题. 力学参数的测量可以为可靠性评价提供有价值的实验依据. 概括总结了显微云纹技术的发展,主要介绍了云纹干涉法和扫描显微镜云纹方法及其在 微电子器件全场变形场测量中的应用.

关键词: 云纹法,微电子器件,力学行为

Abstract: The micro-miniature of electronic devices is greatly promoted by the rapid development of electronics industry. The study on the reliability of the micro-electronic devices is the foundation of designing novel electronic products, and has drawn much attention of researchers. The parameters of mechanical behavior obtained from experiment are the basis of reliability analysis. In this study, the development of micro-moir\'{e} methods is reviewed, covering moir\'{e} interferometry, scanning electronic microscope moir\'{e} methods and their applications to analysis of mechanical behavior of the micro-electronic devices are discussed.

Key words: moiré method, micro-electronic devices, mechanics behavior