Abstract: In this paper, in order to annlysis the influence of multi-layer componenton microhardness testing, the pressing process of the indenter is simulatedby FEPG (Finite Element Program Generator) software. The effects onmulti-layers system including of different material soft layers, differentthickness proportion between soft layer and hard layer and different layernumber in the multilayer are analyzed. A conclusion that multilayerconstruct according to gradient layer can enhance film performance isdrew. It is helpful to provide the reference data for microhardness testing.